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Atomic Force Microscopy (AFM), High Vacuum Environment

Park NX-Hivac

Park NX-Hivac is a high vacuum AFM ideal for precise semiconductor failure analysis and sensitive materials research. Operating in a high vacuum environment, it delivers enhanced accuracy and repeatability, minimizing tip and sample damage. It's the key to a range of applications, including dopant concentration assessment using Scanning Spreading Resistance Microscopy (SSRM). With Park Systems’s intuitive Hivac Manager and automatic vacuum control, Park NX-Hivac streamlines the vacuum process and offers rapid vacuum conditions. Park NX-Hivac offers high-precision research in an oxygen-free vacuum environment.

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